Post on 16-Jan-2017
MEMS (Micro Electro Mechanical Systems)
BY,S.MICHAEL JOSHUA
III Year Mechatronics,
PSG Polytechnic College, Coimbatore
Introduction
MEMS (Micro Electro Mechanical
Systems) is a technology that in its
most general form can be defined
as miniaturized mechanical and
electro mechanical elements (i.e.,
devices and structures) that are
made using the techniques of
microfabrication.
Why MEMS
MEMS can miniaturize electronics
MEMS makes it cost-effective
MEMS makes it reliable
MEMS opens up new opportunities
History and Development of MEMS
The first MEMS device is invented by
an American Electrical Engineer
Harvey C. Nathanson in 1965 and he
invented a Tuner for Micro Electronic
Radios
In later the MEMS was developed in
step by step process in First
generation, Second generation and
Third generation
Flow Chart of MEMS Process
Design Fabrication Testing Packaging
Bulk Micromachining Surface Micromachining LIGA Process
Micro Machining Technology in MEMS
Materials for MEMS
Silicon
Germanium
Gallium Arsenide
Quartz
Plastics and Polymers
Ceramics
Metals
Applications
Applications
Applications
Future MEMS
In future, the each and every product based on electronics is
manufactured under the MEMS technology
The industry challenges is to: Access to Foundries
Design, Simulation and Modelling
Packaging and Testing
Standardization
Education and Training
References
MEMS Journal (www.memsjournal.com)
www.memsnet.org
wikipedia
Thank You!!!