06.13 Información Técnica
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Precise, economical,elastomer-sealed design
AeraFC-7700 Series MFCs
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As the field-proven standard for a range of applications, Advanced Energys
AeraFC-7700 series delivers precise flow control, while offering the economic
benefits of elastomer seals. For process and equipment engineers working in
the semiconductor, flat panel display, data storage, industrial vacuum, and
industrial coating markets, this series provides high reliability and superiorperformance for non-corrosive gas applications, including CVD, PVD, etch,
ion implantation, sputtering, thermal oxidation, optical glass coating, optical
fiber, surface treatment, and other coating processes.
benefitsFast response < 2 sec flow-settling time between set points
Unsurpassed reliability
zero drift < 0.5% of full-scale flow over one year
Easy integrationstandardconnectors and dimensions
Superior resultshigh-qualityfilm and etch characteristics
features
Elastomer seals
VCRconnections
Full-scale flow rangesfrom 10 sccm to 150 slm
Normally-closed or normally-open solenoid control valve
Largest purge-mode flowsavailableup to 100 timesthe calibrated max
Leak integrity of 1 x 10-6
atm-cc/sec of He
low costCustom-made for applications
that require top performance
but not the corrosion resistance
or ultra-high leak integrity of
metal seals, the FC -7700 series
is both cost-effective and precise.
fast responseAdvances in the FC-7700 ser ies
technical design deliver enhanced
operation compared to competing
mass flow controllers (MFCs).
These advances include a highly
sensitive, rapid- response, small-
diameter sensor. Further, compared
to competing models slower thermal
valves, the FC-7700 ser ies normally -
open or normally-closed solenoid
design supplies a faster response.
These speed enhancements eliminate
over-shoot or under-shoot and
produce an actual- flow settling time of
< 2 sec between set pointsthe fastesttime of anyMFC with a standard
solenoid control valve.
unsurpassed reliabilityHigh-quality electronic components
and a robust, minimal- parts design
stand up to the effects of strong
RF fields and other operational
demands, delivering the best, long-
term, zero-drift stability available
< 0.5% of full-scale flow over one year.
With over 25,000 units in the f ield,
< 0.5% are returned within a year of
shipment.
easy integrationObtain the performance andreliability advantages of Aera MFCs
by replacing other brandswith no
installation hassles. Certain models
feature standard electrical connectors
and critical dimensions to easily
fit existing systems.
superior resultsFC-7700 series MFCs producefilm and etch characteristics that
are not only extremely uniform,
but also highly repeatable.
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model and suffix codes
Category Suffix Codes
Product
Flow Controller FC-
Flow
10 sccm to 5 slm 7700
6 to 20 or 50 slm 7710
35 to 150 slm 7720
Connector
Aera20-pinCard Edge
C
Standard 9-pin D CD
Standard 20-pinCard Edge
CU
Fittings
1/4VCR 4V
3/8VCR(>100 slm) 6V
Example FC 7700 C 6V
specifications
OperationalFC-7700, 7700C,7700CD, 7700CU
FC-7710, 7710C,7710CD, 7710CU
FC-7720, 7720C, 7720CD
Full-Scale Range 10 sccm to 5 slm 6 to 20 slm*20 to 50 slm
35 to 150 slm
Response Time < 2 sec to within 2% of set point < 3 sec to within 2% of set point
Accuracy Within 1% of full scale Within 2% of full scale
Linearity Within 0.5% of full scale Within 0.5% of full scale*Within 1% of full scale
Within 1% of full scale
Repeatability Within 0.2% of full scale
Leak Integrity 1 x 10 -6atm-cc/ sec (He) max
Control Range 5 to 100% of full scale
Differential Pressure 7 to 40 psi(362 to 2069 Torr)
10 to 40 psi (517 to 2069 Torr)*
14 to 40 psi (724 to 2069 Torr)21 to 40 psi
(1086 to 2069 Torr)
Normal Operating Pressure 50 psi (2586 Torr)
Maximum Inlet Pressure 150 psi (7740 Torr) max
Temperature Range 5 to 45C (41 to 113F)
* Low-ow model
High-ow model
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For more information on non-vacuum products and applications, contact EMCO Sales:Advanced Energy 1625 Sharp Point Drive Fort Collins, CO 80525 USAT: 800.446.9167 or 970.221.4670 F: 970.221.5583 www.emcoow.com
For information on vacuum-related products and applications, contact Advanced Energy Sales:Advanced Energy Industries , Inc. 1625 Sharp Point Drive Fort Collins, Colorado 80525T: 800.446.9167 or 970.221.4670 F: 970.221.5583 [email protected] www.advanced -energy.com
United Kingdom
T: 44.1869.320022F: 44.1869.325004
Germany
T: 49.711.779270F: 49.711.7778700
Korea
T: 82.3 1.705.2100F: 82.31.705. 2766
JapanT: 81.3.32351511F: 81.3.32353580
TaiwanT: 886.2.82215599F: 886.2.82215050
ChinaT: 86.21.58579011F: 86.21.58579003
Advanced Energy Industries, Inc. 2003
All rights reserved. Printed in U.S.A.
SL-FC7700-230-01 2.5M 10/03
PhysicalFC-7700, 7700C,7700CD, 7700CU
FC-7710, 7710C,7710CD, 7710CU
FC-7720, 7720C, 7720CD
Control Valve TypeNormally -closed solenoid, except FC -7700 and FC -7710 Normally -open or normally -
closed solenoid
Seals ElastomerViton
Materials Stainless-steel type 316L, Viton, Teflon
Standard Fittings 1/4 VCR 1/4 VCR, 3/8 VCR
Attitude Sensitivity May be mounted in any position
Weight 0.91 kg (2.0 lb) 2.27 kg (5.0 lb)
ElectricalFC-7700, 7700C,7700CD, 7700CU
FC-7710, 7710C,7710CD, 7710CU
FC-7720, 7720C, 7720CD
Input Power +15 VDC 2% at 25 mA-15 VDC 2% at 180 mA
+15 VDC 2% at 25 mA
-15 VDC 2% at 200 mA
Power Consumption 3.1 W max 3.5 W max
Input Command Signal 0 to 5 VDC
Output Indication 0 to 5 VDC
dimensions
FC-7700, 7700C,7700CU, 7700CD
FC-7710, 7710C,7710CU, 7710CD
FC-7720, 7720C,7720CD
A 12.7 mm (0.5") 15.0 mm (0.6") 15.0 mm (0.6")
B 76.0 mm (3.0") 76.0 mm (3.0") 133.5 mm (5.3")
C 124.0 mm (4.9") 124.0 mm (4.9") 183.8 mm (7.2")
D 18.0 mm (0.7") 18.0 mm (0.7") 25.5 mm (1.0")
E 69.0 mm (2.7") 69.0 mm (2.7") 101.5 mm (4.0")
F119.0 mm (4.7") 119.0 mm (4.7") 151.0 mm (5.9")
G 127.0 mm (5.0") 127.0 mm (5.0") 152.6 mm (6.0")
H 32.0 mm (1.3") 32.0 mm (1.3") 37.5 mm (1.5")
I 5.0 mm (0.2") 5.0 mm (0.2") 16.0 mm (0.6")
Advanced Energyand Aeraare registered trademarks of Advanced Energy Industries, Inc.Teon and Vitonare registered trademarks of E. I. Du Pont De Nemours & Company.
VCRis a registered trademark of Cajon Company.